Another group is taking flights to Delhi on Thursday.
The list of invitees comprises Padma awardees Pt Chhannulal Misra, Prashanti Singh, Rajnikant and son of late folk singer Hiralal Yadav.
Besides, the four proposers of Modi, the vice-chancellors of Banaras Hindu University, Mahatma Gandhi Kashi Vidyapeeth and Sampurnanand Sanskrit University, industrialists, head of Kashi Vidwat Parishad and local dignitaries are also among the invitees.
All MLAs, MLCs, state level, Kashi region, city unit office-bearers as well as poll management team members from Varanasi also figure in the list.
Kashi region unit president Mahesh Chandra Srivastava said: "Only Varanasi has got such large number of invites. All the guests from Prime Minister's constituency will be seated in a special gallery named 'Kashi Sankul'."
Kashi region IT cell in-charge, Vaibhav Kapoor said: "In 2014, only 40 party leaders got invitation for oath taking ceremony. But, this time around 250 people from Kashi are getting this opportunity. All party leaders and workers are pleased as they had never imagined that Prime Minister Modi will thank them in this way."
Modi had visited Varanasi to express his gratitude to Kashi citizens, party leaders and workers for ensuring his victory.